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Intelligent and Active Gas Detection System for Semiconductor Manufacturing

As one of the world's largest semiconductor manufacturers, our customer needs to continually refine and expand their manufacturing capabilities to meet the constant, ever-growing demand for electronics products. Semiconductor fabrication requires minute nanometer-scale operations using dangerous chemicals and gases. To continue growing their manufacturing capabilities while maintaining high levels of precision, the manufacturer expanded operations with a new plant which was to incorporate new gas detection alarm technology. System Requirements • Real-time alerts of abnormal gas levels on the supervisory control and data acquisition (SCADA) system • Local alarms with local control logic to alert personnel of high gas levels • Mixed analog and digital I/O solution for broader device compatibility • High reliability

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  • SUPPLIER
  • MOXA
    MOXA is a leading provider of industrial networking, computing, and automation solutions for enabling the Industrial Internet of Things. Moxa offers a full spectrum of innovative, high-quality solutions that have been deployed in a wide variety of industries, including factory automation, smart rail, smart grid, intelligent transportation, oil and gas, marine, and mining.
  • INDUSTRIES
  • Equipment & Machinery
  • FUNCTIONS
  • Discrete Manufacturing
  • CUSTOMER
  • One of the world's largest semiconductor manufacturers from Taiwan

  • CONNECTIVITY PROTOCOLS
  • SOLUTION
  • A semiconductor factory's gas detection alarms are the very definition of a mission critical system. Abnormal levels of the dangerous gases used in semiconductor manufacturing will not only cause expensive breakdowns but could even cost lives. Traditionally, semiconductor manufacturers have used programmable logic controllers (PLCs) to monitor their alarm systems. PLCs are well-suited for control applications, but the limitations of their passive communications architectures become clear when used as an alarm solution. In order to communicate with the PLC, the SCADA system has to repeatedly poll the device using older RS-485 communications. Moxa made it possible for our customer to take advantage of modern industrial Ethernet networking technology and deploy an active "push"-based alarm system. The ioLogik E2242 intelligent Ethernet I/O device was selected for this system because it can take the initiative to "push" updates to the Active OPC Server. This powerful I/O device possesses the local intelligence and communications capabilities to actively update the SCADA system whenever there is a change in analog gas readings. The resulting active architecture consumes fewer network resources than conventional polling systems while still ensuring that the latest gas readings are available on the SCADA. Moxa's exclusive auto-tag generation technology significantly simplifies the configuration of these potent features, so SCADA engineers can focus on other parts of the SCADA system instead of laboriously constructing tags one at a time at an OPC server. With four analog inputs and 12 configurable digital input and output channels, the E2242 is a flexible and cost effective solution. Our customer uses the digital outputs to connect to a light tower and local buzzer to alert personnel when high gas levels are detected. Local alarms were configured with the menu-driven Click&Go™ interface, which is completely code-free and easy to set up. Product Solutions: ioLogik E2242 Smart Ethernet Remote I/O with 12 DIOs, 4 AIs

  • DATA COLLECTED
  • Alarms For Automated Applications, Communication Performance, Gas Leak, Gas Meters, Operating Time
  • SOLUTION TYPE
  • SOLUTION MATURITY
  • Mature (technology has been on the market for > 5 years)
  • OPERATIONAL IMPACT
  • Impact #1
    [Efficiency Improvement - Labor]
    Auto tag generation saves time compared to creating tags on the OPC Server
    Impact #2
    [Cost Reduction - Connectivity]
    Analog and digital signal collection in one module reduces expenses
    Impact #3
    [Efficiency Improvement - Deployment]
    No programming required, conserving deployment and development time
  • QUANTITATIVE BENEFIT
  • USE CASES
  • Process Control & Optimization
    Process control and optimization (PCO) is the discipline of adjusting a process to maintain or optimize a specified set of parameters without violating process constraints. The PCO market is being driven by rising demand for energy-efficient production processes, safety and security concerns, and the development of IoT systems that can reliably predict process deviations. Fundamentally, there are three parameters that can be adjusted to affect optimal performance. - Equipment optimization: The first step is to verify that the existing equipment is being used to its fullest advantage by examining operating data to identify equipment bottlenecks. - Operating procedures: Operating procedures may vary widely from person-to-person or from shift-to-shift. Automation of the plant can help significantly. But automation will be of no help if the operators take control and run the plant in manual. - Control optimization: In a typical processing plant, such as a chemical plant or oil refinery, there are hundreds or even thousands of control loops. Each control loop is responsible for controlling one part of the process, such as maintaining a temperature, level, or flow. If the control loop is not properly designed and tuned, the process runs below its optimum. The process will be more expensive to operate, and equipment will wear out prematurely. For each control loop to run optimally, identification of sensor, valve, and tuning problems is important. It has been well documented that over 35% of control loops typically have problems. The process of continuously monitoring and optimizing the entire plant is sometimes called performance supervision.
  • HARDWARE
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